JPH0162364U - - Google Patents
Info
- Publication number
- JPH0162364U JPH0162364U JP15471987U JP15471987U JPH0162364U JP H0162364 U JPH0162364 U JP H0162364U JP 15471987 U JP15471987 U JP 15471987U JP 15471987 U JP15471987 U JP 15471987U JP H0162364 U JPH0162364 U JP H0162364U
- Authority
- JP
- Japan
- Prior art keywords
- underframe
- guide mechanism
- frame
- vertical
- solution tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007791 liquid phase Substances 0.000 claims description 2
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987154719U JPH0613262Y2 (ja) | 1987-10-12 | 1987-10-12 | 竪型液相エピタキシヤル成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987154719U JPH0613262Y2 (ja) | 1987-10-12 | 1987-10-12 | 竪型液相エピタキシヤル成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0162364U true JPH0162364U (en]) | 1989-04-20 |
| JPH0613262Y2 JPH0613262Y2 (ja) | 1994-04-06 |
Family
ID=31431699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987154719U Expired - Lifetime JPH0613262Y2 (ja) | 1987-10-12 | 1987-10-12 | 竪型液相エピタキシヤル成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0613262Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515636A (en) * | 1974-07-04 | 1976-01-17 | Tokyo Gas Co Ltd | Ekitainenryono chitsusosankabutsuteihatsuseinenshohoho |
| JPS5815218A (ja) * | 1981-07-20 | 1983-01-28 | Hitachi Ltd | 液相エピタキシヤル成長装置 |
-
1987
- 1987-10-12 JP JP1987154719U patent/JPH0613262Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515636A (en) * | 1974-07-04 | 1976-01-17 | Tokyo Gas Co Ltd | Ekitainenryono chitsusosankabutsuteihatsuseinenshohoho |
| JPS5815218A (ja) * | 1981-07-20 | 1983-01-28 | Hitachi Ltd | 液相エピタキシヤル成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0613262Y2 (ja) | 1994-04-06 |